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Hexafluoroethane

Central China Special Gas Co., Ltd.
Central China Special Gas Co., Ltd.
City: Foshan
Province/State: Guangdong
Tel: 86-757-89932168
Contact Person: Catherine Wang

Hexafluoroethane

Place of Origin : China
Brand Name : CCSG
Model Number : ccsg-23
Packaging Details : cylinder
Delivery Time : 30 days
Payment Terms : FOB
Supply Ability : 1000pcs/day
MOQ : 100pcs/day
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Application:Hexafluoroethane is used as a versatile etchant in semiconductor manufacturing. It can be used for selective etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon. The solar panel manufacturing industry is one of the major emitters of hexafluoroethane, which has a greenhouse gas potential 12,000 times greater than CO2.

Together with trifluoromethane it is used in refrigerants R508A (61%) and R508B (54%).

Product Specification


Name

Hexafluoroethane

CAS No.

76-16-4

MF

C2F6

EINECS No.

200-939-8

Grade

Purity

Impurity content (ppm)

99.999%

O2≤0.5, N2≤0.5, CO ≤0.1, CO2≤0.1, Acidity≤0.003, Moisture≤0.1, Other Organics≤0.01

Physical Date


Molecular Weight

138.02 g/mole

Boiling Point

-108.8oF (-78.2oC)

Specific Volume

0.628931 ft3/lbs at 70oF

Vapor Pressure

@70oF (21.1oC) = 445 psia (3068 kPa)

Liquid Density at Boiling Point

100.4 lb/ft3(1608kg/m3)

Gas Density at 70oF. 1 atm

358 lb/ft3(5.73kg/m3)

Solubility In Water

Very slightly soluble

Freezing Point

-149.3oF (-100.7oC)

Evaporation Rate

N/A (Gas)

Specific Gravity (Air=1)

@70oF (21.1oC) = 4.78

Appearance And OdorColorless, odorless gas.


Product Tags:

Hexafluoroethane

      

C2F6

      

refrigerant

      
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